Diamondback Design Group Semiconductor Design Services

Diamondback Design Group Semiconductor Design Services Mission Diamondback Design Group desires to provide value through our experience and expertise in support of the unique needs to the Semiconductor Industry. Vision A growing and focused design firm with application specific solutions to meet or exceed Semiconductor Industry requirements. Value Diamondback Design recognizes the importance of providing safe, economical and dependable designs to our clients. We value clients that collaborate towards these commonalities for effective, quality designs. We provide value through our focus on field investigation combined with years of expertise within the Semiconductor Industry. Who We Are, What We Do Diamondback Design Group was established in 1996 to support a niche market specific to the Semiconductor Industry. This specific focus of “Tool Installation Design” has since expanded to include a diverse Mechanical, Electrical, Piping (MEP) infrastructure service. As a natural progression of the multitude of Mechanical and Electrical systems involved in the tool install effort, Diamondback has provided numerous new and existing support systems for their installation. Our company provides Clean Room Design Services that parallel the activity customarily related to Architectural programming, layout and code evaluation related to building design. As part of this design service, with our familiarity of numerous tools and processes, we provide clean room layouts for efficient, compact, accessible and safe use. The following list is a summary of our design services for our Semiconductor clients. We often analyze and trouble shoot existing systems for needed flow and pressure distribution. For each of the following systems, we carefully specify the appropriate materials, components and controls as they relate to the material or process involved. Priority is given to safety and environment when all else has been considered in benefit of our client.

DDG_Semiconductor Services_2014

Process Gas Systems Gas Rooms Design: HVAC / Make-up Air Supply, Exhaust and Scrubbed / Toxic Exhaust Controls Interface for Toxic Gas Monitoring and Life Safety Systems Code Review and Interpretation with Local Code Officials Bulk Gas Storage Design Gas Cabinets, Gas Valve Manifold Boxes VMB and Related Exhaust Systems Clean Dry Air systems from Generation Plant to Point of Use. Nitrogen, High Purity Nitrogen, Bulk LN2 and distribution design. Vacuum System Design, Plant Equipment and Piping Distribution Natural Gas (Fuel Gas) from Provider Service to Point of Use Chemical Distribution Systems Equipment Room Design / Fit-Up Distribution Design / Node Analysis High Purity Water Supply and Distribution Process Fluid Waste and Recovery Systems. Process Cooling Systems Process Cooling Water Systems with Constant Volume or Variable Volume Water Quality / Chemical Treatment Systems Sensible Cooling Loops for Clean Room HVAC systems Tool Specific Chillers / Water Systems Piping Systems Acid Waste Neutralization System Installation and Upgrades Acid Reclaim Systems and Recovery Piping Solvent Waste Recovery and Reclaim piping Cryogenic Fluid Distribution Piping Steam and Clean Steam Generation: Gas Fired Boilers, Steam Driven Boilers, Layout, Design and Distribution Condensate Recovery Systems Steam Heating, Steam Process Equipment, Steam Humidification Humidification Water: Design of Multiple Systems Including: Compressed Air and Water, Point of Use Steam, Ultrasonic and Central Steam Designs

DDG_Semiconductor Services_2014

Chilled Water: Cooling Tower Installations, Chiller Installations, Layout and Piping Design Heating Water: Heating Water Systems with Constant Volume or Variable Volume Heating Water Production from Steam Compressed Air: Oil Free Air System Design and Distribution Piping Plumbing Design: Domestic Water Supply Sanitary Waste and Venting Storm Water Drainage from Building Industrial Cold Water (Non-potable Water) Eye-Washes and Safety Showers Heat Recovery / Energy Reclaim Scrubber Cooling Water Pre-Cooling of Make-Up Air Systems Exhaust System Heat Recovery Desiccant Heat Wheel Applications Heating, Ventilation, and Air Conditioning HVAC Make-Up Air Systems for Clean Rooms: Multiple Stage Heating, Humidification, De-Humidification and High Purity Supply for VAV or Constant Volume Applications Make-Up Air Systems for Gas Bunkers Custom Design for Sensible Cooling Recirculation Air Handlers Space Pressure Control and Control Systems Code Ventilation Requirements Design and Implementation. Data Center, Data Room and Telecom cooling systems design Commercial Cooling and Heating Applications Evaporative Cooling, Evaporative Humidification Applications Controls and Sequence of Operations Implementation for Each Type of System Air Conditioning Load Analysis Building Analysis using DOE-2 Based Modeling and Simulation Methods for Energy Conservation and Envelope Design Comcheck for Envelope Energy Code Compliance

DDG_Semiconductor Services_2014

Industrial Ventilation and Exhaust Systems. Acid Scrubber Exhaust Systems and Equipment Specification Solvent Abatement using Regenerative Media or Condensation Methods General Exhaust Systems Dilution Ventilation Applications for Process Specific Environments Dust Conveying Systems: Constant Volume Designs to Covey Product or Waste Materials Engineered to Avoid the Need for Balancing Dampers Cyclone Separators / Bag Houses, Filter Design Controls and Sequence of Operations Implementation for Each Type of System Environmental Engineering Air Permit Review and System Modifications Waste Permit Review and System Modifications RCRA Compliance Verification for Hazardous Waste Piping and Tank Systems Hazardous Materials Management and Inventory Hazmat Analysis for Code Compliance, Exempt and Allowable Quantities Assessment Electrical Systems The following systems are currently provided under joint venture agreements with our preferred consultants: General Power Distribution Clean Power Systems Stand-By Power / Redundant systems Emergency Power Systems Design, Layout and Implementation Power Factor Adjustment Interior and Exterior Lighting Data Room Design Controls Design Toxic Gas Monitoring System Design Life Safety Security Systems

DDG_Semiconductor Services_2014

Additional Design Services: Design for Support Spaces Our Engineering services frequently extend beyond Semiconductor design. As such we also support those areas related to the site such as: Offices, Kitchen and Cafeteria / Dining Design, Class rooms and Conference Rooms, Computer Rooms and Specialty Laboratories. On Site Staffing Diamondback Design Group provides on site staff augmentation when deemed appropriate by the client for long duration schedules. On site staffing usually accommodates our Engineers, Designers and Draftsman to interface with the clients technical staff for a successful quality project. Data Base Ownership Diamondback Design Group can provide database management for CADD documents, As-built files in electronic format, Systems that undergo frequent changes and are subject to capacity limitations or marginal delivery capabilities, HAZMATs and Hazmat inventory statements. Project Management Diamondback Design Group can provide a single source for the management of multiple activities with multiple resources such as a steady flow of tools designed installed by engineering, designers, draftsman, vendors, contractors, and other interested parties for a complete operation installation. This includes coordination of documents, drawings, contracts, permits and inspections. Structural Engineering Diamondback Design Group has on going working relationships with several reputable Structural Engineering Firms. When needed, these relationships are engaged to support project requirements under a single contract for ease of project management for the client. Architectural Diamondback Design Group is confident to handle most Tenant Improvement, Move and Re-arrange related projects. However as the need arises, we have on going working relationships with key Architectural Firms that specialize in Industrial and Semiconductor facilities. DDG_Semiconductor Services_2014

References: Mark Pyland Senior Project Manager, Intel Chandler Campus 480.554.5028 Ryan Finch Project Director, AMTS – Global Foundries, Malta, NY 518.305.1415 Dan Codi SVP, of Product Development - AM Technical Solutions 845.545-9483 Rick Pomerenke Senior Project Manager, ON Semi Phoenix Campus 602.244.4677

DDG_Semiconductor Services_2014

Diamondback Design Group Project:

AWN System Upgrade at Existing Semiconductor Plant

This project included a fall schematic and plan view as-built of an existing 500 GPM AWN system, including piping, equipment, and controls. Diamondback Design coordinated with a survey team to establish actual pipe slope to city sewer. This was used to establish new tank and piping elevations, upgrading final output by 350 GPM. This design was produced in four construction phases, to allow full installation with no impact / shutdown for production required. AWN System Upgrade

GENERAL NOTES

KEYED NOTES

REPRESENTATIVE ELEVATIONS

WEST ELEVATION

SOUTH ELEVATION

Elevations

Diamondback Design Group Project:

AWN System Upgrade

Client:

Confidential

Location:

Metropolitan Phoenix Area

Area:

2,600 sq. ft.

Costs:

$930K

AWN System Upgrade

GENERAL NOTES

KEYED NOTES

WEST ELEVATION

SOUTH ELEVATION

Pump Elevations

Diamondback Design Group Project:

Gown Room Conversion AHU Upgrades

Client:

Confidential

Location:

Metropolitan Phoenix Area

Area:

2,850 sq. ft.

Costs:

$6.4m

Air Handler

GENERAL NOTES

KEYED NOTES

EXISTING MUA-09

AIR FLOW DIAGRAM

Air Flow Diagram

MAKE-UP AIR DISTRIBUTION & EXHAUST SUMMARY

Diamondback Design Group Project:

Gown Room Conversion

This project included relocating an existing Gown Room from the ground floor to an upper floor, installing bay and chase cleanroom with pressurized plenums and rooftop air handlers, and fitting up the new cleanroom for Etch and Diffusion processes. This work was performed in parallel with other expansions for a Copper Process area and an EPI Bay / Support facility. All production for this client was maintained during a phased construction.

New Bay

A

2

RACK DETAIL - SUBFAB LEVEL 2

BUILDING SECTION

1

RACK DETAIL - FAB LEVEL 1

NEW PIPING SECTION VIEW

Piping Elevation

Diamondback Design Group Project:

Multiple Cleanroom Expansions, with Ceiling-Hung Air Handlers and Ducted Hepas.

These cleanroom projects involved custom low-profile air handlers that allow for a 10'-0" high cleanroom constructed in a 16'-0" high structure. Planning included access platform for VFD and smoke detection to be installed above ceiling saving cleanroom space. Cleanroom costs for Architectural and HVAC / Electrical were averaging approximately $350 / ft2 for these projects. Custom Air Handler

GENERAL NOTES:

KEYED NOTES:

1

DRIP PAN DETAIL

RECIRCULATION AIR HANDLER - RCU-10 & RCU-11

Air Handler Equipment Template

Diamondback Design Group Project:

Continuing Tool Hook-up

Client:

Confidential

Location:

Metropolitan Phoenix Area

Area:

38,000 sq. ft.

Costs:

Not Available

Fab Level Equipment

GENERAL NOTES

KEYED NOTES

SAMPLE DRAWING MECH. SCHEMATIC WET PLATING TOOL

MECHANICAL SCHEMATIC

Mechanical Schematic

PL01MOA

Diamondback Design Group Project:

Continuing Tool Hook-up

Diamondback Design provided tool hook-up design and system upgrades as required to support a 38,000 sq. ft. semiconductor factory over a four year period. This project was completed in association with Dietrich Architectural Group and Construction Electrical Services Inc.

Subfab Level Equipment

GENERAL NOTES

KEYED NOTES

SAMPLE DRAWING MECH. SCHEMATIC LAMINATE PRESS LP01MOA

Mechanical Schematic

Diamondback Design Group Project:

Specialty Gas and Bulk Chemical Facilitation

Client:

Confidential

Location:

Metropolitan Phoenix Area

Area:

240,000 sq. ft.

Costs:

Not Available

BCDS Area

P.O.C. LEGEND A

G

B

H

C

I

D

J

E

K

F

L

M

S

N

T

O

U

P

V

Q

W

R

X

Y

KEY PLAN

N

P

FF GG

BB

HH

CC

II

R

GENERAL NOTES

16

EE

Z AA

Q

P.5

K

KEYED NOTES

X

W

L

3 UU

II DD

XX 3

JJ

1

JJ SS

KK

QQ

LL

RR

MM

J I

2

V

U

GG

TT

HH

SS

NN

TT

OO

UU

PP

XX

H

RR

T EE

G

F

E

D

S

FF

QQ

PP 7

17 R

DD

Q

OO CC

P

NN

BB AA

4

O

C

MM

5

LL

Y 8

Z 3

A

B

M

N

3

KK

18

AQUEOUS ROOM (BCDS) - EXHAUST PLAN - SUBFAB LEVEL 1

Exhaust Plan

CONFIDENTIAL CLIENT EXHAUST PLAN AQUEOUS ROOM (BCDS) SUBFAB LEVEL - 1

Diamondback Design Group Project:

Specialty Gas and Bulk Chemical Facilitation

Diamondback Design provided detailed design for room requirements, exhaust, and support systems needed for specialty gas and BCDS fit-up project. Provided on-site construction support for 10 month project duration. Provided architectural as-builts for all project equipment. Diamondback Design was a member of the TriMega design / build effort to facilitate this project.

Typical Specialty Gas VMB

GENERAL NOTES

KEYED NOTES

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

LEGEND

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

SPECIALTY GAS EXHAUST FLOW SCHEMATIC - SUBFAB LEVEL - 1 (2 of 3)

Exhaust Schematic

MECHANICAL SCHEMATIC

MECHANICAL SCHEMATIC

CONFIDENTIAL CLIENT SPECIALTY GAS SYSTEMS MECHANICAL SCHEMATIC 4828M114

Diamondback Design Group Project:

Semiconductor PCW Loop

Added 350 gpm PCW loop with controls to allow 1.0 mOhm resistivity to be maintained. Design included review of spare parts available and designed system around existing heat exchanger and tank.

PCW Skid

GENERAL NOTES:

KEYED NOTES:

PROCESS COOLING WATER SCHEMATIC - PCW SKID

Mechanical Schematic